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Hardware DISCO HI-TEC PAD,VACUUM (D15) MOJET019 (6 PKG)
Sensor MOORE IND. SEN/CL300/D18/CU/-PT104-AVG-VDT-SPL RTI3 tempature assy
Valve FURON DV2-224NCD2 2-WAY DELTA VALVE; NORMALLY CLOSED - 1/8 ORIFICE 24VDC Broken port"
Controller Watlow Anafaze (LAM) 778-900046-001 temperature 24 to 28V (AC/DC)
OEM Part KLA / TENCOR 730-450499-00 cassette 1 EXT sensor