OEM Part
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(AMAT) 0150-01589 Insulator Ceramic...$199.00 -
(LAM) 839-020965-320 Si, ASSY, ELECTRODE, OUTER,...$425.00 -
Novellus 15-276687-00 RING,...$500.00 -
(TEL) 3D10-150109-11 Bottom Shield Ring...$399.00 -
(TEL) 3D10-200153-15 INSULATOR HOLDER Ring 300mm...$500.00 -
(AMAT) 3010-01021 ABRSV PAD WND PKG...$200.00 -
Novellus 15-277663-00 Ring Ceramic...$350.00 -
Novellus 15-183815-00 Ring Ceramic...$750.00 -
Novellus 17-276330-00 LINER LOWER...$299.00 -
(AMAT) 0150-10225 VACUUM LINE HEATER CH...$65.00 -
SVG THERMCO 999543-001...$215.00 -
Bottom Plate Injector (WJ) 938397-001 16 in Bottom Plate Injector...$400.00