OEM Part
-
KLA / TENCOR 0119575-001FRU Aperture Rod Assy...$225.00 -
ASML SERV.502.30312 ATRS HALL Sensor...$200.00 -
ASML SERV.640.77031 RH Frame Fiber Optic Sensor...$125.00 -
ASML SERV.436.74321 Primary Switcher 3.3V...$350.00 -
ASML SERV.471.56752 VAT DRIVER BOARD /800...$500.00 -
Novellus-Gasonics A01-012-01 CHAMBER BOTTOM AURA...$225.00 -
AXCELIS 563111 VALVE...$500.00 -
VARIAN 4525600 Beam Dump...$400.00 -
VARIAN 4525500 Beam Dump...$450.00 -
VARIAN 4467300 Beam Dump...$250.00 -
VARIAN E17187890 Electrode...$550.00 -
VARIAN E17166540 Aperture...$225.00