OEM Part
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SVG THERMAL 2000118-001 Endefector, Rear, Bottom, LH, 200mm Ceramic...$195.00 -
Pedestal Platen W/A 2.6kw -150mm and 100mm Heater Aviza 707063...$1,800.00 -
(AMAT) 0020-78871 MOTOR MOUNT, ROBOT...$145.00 -
(AMAT) 0020-09412 SLEEVE, SEAL...$30.00 -
(AMAT) 0090-77148 CLM MODULE ASSY...$899.00 -
VARIAN E11094821 Pick Assy Shuttle Left...$175.00 -
INJECTOR Assy/VENT,16- PL Watkins Johnson (WJ) 938801-001...$1,800.00 -
AVIZA TECHNOLOGY / triton 157366 150mm GaAs Platen...$650.00 -
AVIZA TECHNOLOGY 720522 Shield Ring / ESC Cover...$245.00 -
AVIZA TECHNOLOGY 196494 200MM Wafer Shield...$145.00 -
TRIKON 189185 Shutter Blade Titanium...$395.00 -
(AMAT) 0021-79198 PLATE ANGLE ADJUST SHUTTLE...$30.00