OEM Part
-
TEGAL 39-34-005 Chamber body...$300.00 -
VARIAN E17134881 Aperture Lens No 1 Impregnated...$199.00 -
VARIAN e17134882 Aperture Lens NO...$199.00 -
ASML 4022.456.0195 DOE 12 193nm ADE 300mm...$400.00 -
ASML 4022.456.0113 DOE 193nm ADE 300mm...$400.00 -
Watkins Johnson (WJ) 925574-001 INJECTOR CHAMBER BAFFLE, W1000 BAFFLE...$25.00 -
VARIAN E17166541 Aperture Defining Impregnated...$200.00 -
VARIAN E17166540 Aperture...$225.00 -
VARIAN E17187890 Electrode...$550.00 -
VARIAN 4467300 Beam Dump...$250.00 -
VARIAN 4525500 Beam Dump...$450.00 -
VARIAN 4525600 Beam Dump...$400.00